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  • Archive: 2005
05 Jan 2005
  • 2005
  • V. 4
  • 1
  • (p.102 - 105)

SnO2 thin film parameter influence on gas sensitive characteristics

Authors:

Brînzari, Vladimir; Korotcenkov, Ghenadie; Dmitriev, Serghei

Summary:

In this report we present results of investigation of influence of the parameters of SnO2 thin film on their gas sensitive properties. SnO2 films were deposited by spray pyrolysis method. The influence of technologic parameters on concentration of free electrons n, stoichiometry, thickness d and gas sensitivity S=Rgas/Rair was investigated by means of electrophysical, IR-spectroscopy and SIMS measurements. It was established that optimal spray solution s composition is 0.2M, which allows depositing of SnO2 films with required parameters: n-1018 -1019 cm-3, R=105 -106 and S>10 correspondently. Obtained results on gas sensitivity are compared with results of theoretical considerations.

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The  influence  of  technologic  parameters  on  concentration  of  free  electrons  n, 
stoichiometry,  thickness  d  and  gas  sensitivity  S=Rgas/Rair  was  investigated  by  means  of 
electrophysical, IR-spectroscopy and SIMS measurements. It was established  that optimal spray 
solution s composition is 0.2M, which allows depositing of SnO2  films with required parameters: 
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BibTeX

@article{ibn_3075,
author = {Brînzari, V.I. and Korotcenkov, G.I. and Dmitriev, S.},
title = {SnO2 thin film parameter influence on gas sensitive characteristics},
journal = {Moldavian Journal of the Physical Sciences},
year = {2005},
volume = {4 (1)},
pages = {102-105},
month = {Jan},
abstract = {(EN) In this report we present results of investigation of influence of the parameters of SnO2 thin 
film on their gas sensitive properties. SnO2 films were deposited by spray pyrolysis method.  
The  influence  of  technologic  parameters  on  concentration  of  free  electrons  n, 
stoichiometry,  thickness  d  and  gas  sensitivity  S=Rgas/Rair  was  investigated  by  means  of 
electrophysical, IR-spectroscopy and SIMS measurements. It was established  that optimal spray 
solution s composition is 0.2M, which allows depositing of SnO2  films with required parameters: 
n-1018
-1019 
cm-3, R=105
-106 

and S>10  correspondently. Obtained  results on gas  sensitivity are 
compared with results of theoretical considerations.   },
url = {https://ibn.idsi.md/vizualizare_articol/3075},
}

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The  influence  of  technologic  parameters  on  concentration  of  free  electrons  n, 
stoichiometry,  thickness  d  and  gas  sensitivity  S=Rgas/Rair  was  investigated  by  means  of 
electrophysical, IR-spectroscopy and SIMS measurements. It was established  that optimal spray 
solution s composition is 0.2M, which allows depositing of SnO2  films with required parameters: 
n-1018
-1019 
cm-3, R=105
-106 

and S>10  correspondently. Obtained  results on gas  sensitivity are 
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Dublin Core

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<dc:creator>Brînzari, V.I.</dc:creator>
<dc:creator>Korotcenkov, G.I.</dc:creator>
<dc:creator>Dmitriev, S.</dc:creator>
<dc:date>2005-01-05</dc:date>
<dc:description xml:lang='en'>In this report we present results of investigation of influence of the parameters of SnO2 thin 
film on their gas sensitive properties. SnO2 films were deposited by spray pyrolysis method.  
The  influence  of  technologic  parameters  on  concentration  of  free  electrons  n, 
stoichiometry,  thickness  d  and  gas  sensitivity  S=Rgas/Rair  was  investigated  by  means  of 
electrophysical, IR-spectroscopy and SIMS measurements. It was established  that optimal spray 
solution s composition is 0.2M, which allows depositing of SnO2  films with required parameters: 
n-1018
-1019 
cm-3, R=105
-106 

and S>10  correspondently. Obtained  results on gas  sensitivity are 
compared with results of theoretical considerations.   </dc:description>
<dc:source>Moldavian Journal of the Physical Sciences 4 (1) 102-105</dc:source>
<dc:title>SnO2 thin film parameter influence on gas sensitive characteristics</dc:title>
<dc:type>info:eu-repo/semantics/article</dc:type>
</oai_dc:dc>

        

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BRÎNZARI, Vladimir; KOROTCENKOV, Ghenadie; DMITRIEV, Serghei. SnO2 thin film parameter influence on gas sensitive characteristics. In: Moldavian Journal of the Physical Sciences. 2005, nr. 1(4), pp. 102-105. ISSN 1810-648X.

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