Archive: 2005 - Moldavian Journal of the Physical Sciences

05 Jan 2005

2005
V. 4
1
(p.98 - 101)

Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity

Authors:

Brînzari, Vladimir; Korotcenkov, Ghenadie; Dmitriev, Serghei

Summary:

This paper presents result of investigation aimed at the improvement of gas sensitive properties of SnO2 thin film gas sensors (TFGS) by means of high frequency (HF) oxygen plasma treatment and its surface doping. Used in experiments SnO2 films were deposited by spray pyrolysis method. It is shown that plasma treatment provides 3-4 times growth of thin film gas sensitivity. Surface doping of SnO2 films with Pd leads to gas sensitivity increasing by order. It is concluded that combination of HF oxygen plasma treatment and surface sensibilization through surface doping is an effective way to considerable improvement of gas sensitive properties of tin dioxide based TFGS.

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<meta name="citation_author" content="Korotcenkov, Ghenadie">
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plasma  treatment and  its surface doping. Used  in experiments SnO2  films were deposited by 
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BibTeX

@article{ibn_3072,
author = {Brînzari, V.I. and Korotcenkov, G.I. and Dmitriev, S.},
title = {Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity},
journal = {Moldavian Journal of the Physical Sciences},
year = {2005},
volume = {4 (1)},
pages = {98-101},
month = {Jan},
abstract = {(EN) This  paper  presents  result  of  investigation  aimed  at  the  improvement  of  gas  sensitive 
properties of SnO2  thin  film gas  sensors  (TFGS)  by means of high  frequency  (HF) oxygen 
plasma  treatment and  its surface doping. Used  in experiments SnO2  films were deposited by 
spray pyrolysis method. It  is shown  that plasma treatment provides 3-4  times growth of  thin 
film gas sensitivity. Surface doping of SnO2  films with Pd leads to gas sensitivity increasing 
by  order.  It  is  concluded  that  combination  of  HF  oxygen  plasma  treatment  and  surface 
sensibilization through surface doping is an effective way to considerable improvement of gas 
sensitive properties of tin dioxide based TFGS.   },
url = {https://ibn.idsi.md/vizualizare_articol/3072},
}

DataCite

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properties of SnO2  thin  film gas  sensors  (TFGS)  by means of high  frequency  (HF) oxygen 
plasma  treatment and  its surface doping. Used  in experiments SnO2  films were deposited by 
spray pyrolysis method. It  is shown  that plasma treatment provides 3-4  times growth of  thin 
film gas sensitivity. Surface doping of SnO2  films with Pd leads to gas sensitivity increasing 
by  order.  It  is  concluded  that  combination  of  HF  oxygen  plasma  treatment  and  surface 
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Dublin Core

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<dc:creator>Brînzari, V.I.</dc:creator>
<dc:creator>Korotcenkov, G.I.</dc:creator>
<dc:creator>Dmitriev, S.</dc:creator>
<dc:date>2005-01-05</dc:date>
<dc:description xml:lang='en'>This  paper  presents  result  of  investigation  aimed  at  the  improvement  of  gas  sensitive 
properties of SnO2  thin  film gas  sensors  (TFGS)  by means of high  frequency  (HF) oxygen 
plasma  treatment and  its surface doping. Used  in experiments SnO2  films were deposited by 
spray pyrolysis method. It  is shown  that plasma treatment provides 3-4  times growth of  thin 
film gas sensitivity. Surface doping of SnO2  films with Pd leads to gas sensitivity increasing 
by  order.  It  is  concluded  that  combination  of  HF  oxygen  plasma  treatment  and  surface 
sensibilization through surface doping is an effective way to considerable improvement of gas 
sensitive properties of tin dioxide based TFGS.   </dc:description>
<dc:source>Moldavian Journal of the Physical Sciences 4 (1) 98-101</dc:source>
<dc:title>Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity</dc:title>
<dc:type>info:eu-repo/semantics/article</dc:type>
</oai_dc:dc>

“ ... ”

SM ISO690:2012

BRÎNZARI, Vladimir; KOROTCENKOV, Ghenadie; DMITRIEV, Serghei. Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity. In: Moldavian Journal of the Physical Sciences. 2005, nr. 1(4), pp. 98-101. ISSN 1810-648X.